Laser-based micro-manufacturing of complex micro structures

Abstract

The microscale layered manufacturing technologies have significant implications for the design and fabrication of complex 3D micro structures. This work presents initial studies on fabricating complex micro structures by a novel micro-manufacturing system. By incorporating laser microdeposition and micromachining with a pulsed Nd:YAG laser, this micro-manufacturing system can take computer-aided design (CAD) output to reproduce geometrically complex micro structures. Laser micromachining was studied on stainless steel and copper foils with a laser beam at wavelengths of 355 nm and 266 nm. Laser microdeposition of copper and stainless steel powder patterns was accomplished with a laser beam at wavelengths of 532 nm. The integration of laser microdeposition and micromachining produced clean and sharp edge for the deposited patterns, improving the resolution of manufacturing and thus quality of micro structures. This additive/subtractive micro manufacturing technology could provide a solid foundation for a seamless integration from CAD to the realization of complex 3D micro structures in a wide selection of materials.The microscale layered manufacturing technologies have significant implications for the design and fabrication of complex 3D micro structures. This work presents initial studies on fabricating complex micro structures by a novel micro-manufacturing system. By incorporating laser microdeposition and micromachining with a pulsed Nd:YAG laser, this micro-manufacturing system can take computer-aided design (CAD) output to reproduce geometrically complex micro structures. Laser micromachining was studied on stainless steel and copper foils with a laser beam at wavelengths of 355 nm and 266 nm. Laser microdeposition of copper and stainless steel powder patterns was accomplished with a laser beam at wavelengths of 532 nm. The integration of laser microdeposition and micromachining produced clean and sharp edge for the deposited patterns, improving the resolution of manufacturing and thus quality of micro structures. This additive/subtractive micro manufacturing technology could provide a solid foundation for a s...