Laser-Aided Diagnostics of Atoms and Particulates in Magnetron Sputtering Plasmas

Abstract

Laser‐aided diagnostic technique is introduced as an advanced and valuable technique to evaluate the properties of plasma. This technique is an expensive and sophisticated technique which requires researchers to have a basic knowledge in optical spectroscopy. In the present paper, we will generally introduce the experimental work using laser‐induced fluorescence (LIF) and laser light scattering (LLS) techniques. The LIF was used to evaluate the spatial distribution of Cu atoms in magnetron sputtering plasma. The change in the spatial distribution was studied as a function of discharge power. On the other hand, the LLS was used to evaluate the generation of Cu particulates in high‐pressure magnetron sputtering plasma. The temporal evolution of Cu particulates in the gas phase of sputtering plasma was visualized successfully.