Abstract

Nano TiO2 thin films on glass substrates were prepared at a constant temperature of (373 K) and base vacuum (10-3 mbar), by pulsed laser deposition (PLD) using Nd:YAG laser at 1064 nm wavelength. The effects of different laser energies between (700-1000)mJ on the properties of TiO2 films was investigated. TiO2 thin films were characterized by X-ray diffraction (XRD) measurements have shown that the polycrystalline TiO2 prepared at laser energy 1000 mJ. Preparation also includes optical transmittance and absorption measurements as well as measuring the uniformity of the surface of these films. Optimum parameters have been identified for the growth of high-quality TiO2 films.

Highlights

  • Nano TiO2 thin films on glass substrates were prepared at a constant temperature of (373 K) and base vacuum (10-3 mbar), by pulsed laser deposition (PLD) using Nd:YAG laser at 1064 nm wavelength

  • Pulsed laser deposition (PLD) technique used for thin film preparation has become one of the focal areas due to its simplicity, versatility and capability in the synthesis of high quality films at relatively low growth temperatures

  • In the present work we demonstrate that there is possibility of using TiO2 at wavelength 1064 nm in manufacturing optoelectronic device such as

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Summary

Key words

Nano TiO2 thin films on glass substrates were prepared at a constant temperature of (373 K) and base vacuum (10-3 mbar), by pulsed laser deposition (PLD) using Nd:YAG laser at 1064 nm wavelength. The effects of different laser energies between (7001000)mJ on the properties of TiO2 films was investigated. ‫تاثير الطول الموجي و الطاقة على الخصائص البصرية و التركيبية لاوكسيد التيتانيوم النانوي المحضر‬ ‫باستخدام طريقة الترسيب بالليزر النبضي‬. ‫الخلاصة‬ ‫ كلفن و تحت‬373 ‫تم تحضير اغشية اوكسيد التيتانيوم النانوية الرقيقة على قواعد زجاجية عند درجة حرارة ثابتة تساوي‬ ‫ ياك عند‬-‫ باستخدام تقنية الترسيب بالليزر النبضي حيث تم استخدام ليزر النديميوم‬,‫ ملي بار‬10-3 ‫الفراغ بمقدار يصل الى‬ ‫ ملي جول على خصائص اغشية‬1000-700 ‫ و تمت دراسة تاثير اختلاف طاقة الليزر ما بين‬.‫ نانومتر‬1064 ‫الطول الموجي‬ ‫ ملي‬1000 ‫ اظهرت فحص حيود الاشعة السينية ان غشاء اوكسيد التيتانيوم المحضر عند طاقة ليزر تساوي‬.‫اوكسيد التيتانيوم‬ ‫ و ايضا التحضير كان يشمل قياسات النفاذية البصرية و الامتصاص وكذلك قياس انتظامية السطح‬.‫جول كان متعدد البلورات‬. ‫ و قد تم التعرف على افضل المعلمات لنمو احسن غشاء لاوكسيد التيتانيوم‬. ‫لهذه الاغشية‬

Introduction
Experimental work
Results and discussion
Conclusions

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