Abstract
A laser terahertz emission system is proposed to investigate the catalytic metal/semiconductor interfaces of hydrogen sensors. Samples were fabricated by depositing a catalytic metal thin film on a semi-insulating silicon substrate. A femtosecond laser was used to radiate terahertz waves from the sample in a gas cell filled with a hydrogen and nitrogen gas mixture. The peak amplitude of the terahertz waves decreased with increasing hydrogen concentration. We also fabricated a metal-oxide-semiconductor field effect transistor hydrogen sensor, and compared its properties with the terahertz radiation properties. These results suggest that the laser terahertz emission system is a potential tool to investigate catalytic metal/semiconductor interfaces.
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