Laser Technologies in Microsystems

Abstract

This article presents some results of laser processing of materials, used for the construction of microsystems and micro-sensors, e.g. Si, Al2O3 and zirconia ceramics. The necessity of faithful reproducing the geometry and dimensions in the micro-scale puts specific requirements for laser machining process. Laser micro-technologies must be conducted under conditions which ensure the perfect guidance of a well-focused laser beam, scanning at a suitable speed, and the laser pulse duration with proper repetition frequency. The amount of absorbed energy depends on wavelength of laser radiation and kind of material, which also influence on this process. All these conditions should take into account the need to maintain a small heat affected zone (HAZ). This guarantees keeping the true reproduction of micro-shapes and cutting edges with a different angle of lines even in micro-scale details. The present work confirms the possibility of using laser technology for such applications.