Abstract
Ultrafine Si 3Ni 4SiC powders have been successfully prepared from hexamethyldisilazane ((Me 3Si) 2NH) (Me CH 3) and NH 3 by a laser-induced gas phase reaction. An optimization experiment aimed at increasing the Si 3N 4 content of the powders has been done with an orthogonal design of the main processing parameters, including the laser power and the gas flow rates of (Me 3Si) 2NH and NH 3. The Si 3N 4 content of the powders has been raised to 70 wt.% and the corresponding processing parameters determined. The powders produced have been characterized by chemical analysis, transmission electron microscopy, IR spectroscopy and X-ray diffraction. They are white-grey in colour, free of hard agglomerates, of average particle size 20 nm and their chemical composition changed with the processing parameters.
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