Abstract
Thin film deposition and laser patterning enable production of integrated electronic thin film sensors on component surfaces. The process consists of two major processing steps: In a first step the component surface is deposited by isolation and sensor films. The sensor film is subsequently patterned by a scanning laser beam in order to generate strain sensor structures. By using a scanning laser beam, in principle any complex shaped surface can be processed. However, scanning of a focused laser beam on curved surfaces requires advanced process knowledge and machine control techniques compared to conventional flat-field laser scanning. We have developed a 3D capable laser scanning process using a femtosecond laser source, a 3-axis galvanometer scanner and a dynamic intensity modulator. The laser process is demonstrated by patterning a NiCr strain sensor on a complex component surface. The results indicate the potential for integration of electronic thin film systems onto the surface of complex component surfaces.
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