Laser spectroscopic investigation of particle behavior in a laser ablation process

Abstract

The behavior of particles ejected in a pulsed-laser deposition (PLD) of a high-temperature superconducting (high- T c)YBa 2Cu 3O 7-δ (YBCO) thin film was investigated by one-dimensional laser-induced fluorescence spectroscopy. It is shown that particles stopped at a finite distance from a target and afterwards they are transported by diffusion. The behavior of ejected particles near the substrate was also examined in-situ during the deposition of high- T c films. Based on these results, a model for the pulse laser deposition of thin films in an ambient gas is presented.