Abstract
The pyroelectric probe technique is now capable of inspecting a 100 x 100-microm TGS area in a few seconds with a 2-microm limit of resolution. The method is described in detail, and a calculation of the pyroelectric signal is presented. The longitudinal growth of a cylindrical domain is mathematically simulated and also the variation of pyroelectric signal at domain boundary. These calculations are in good accordance with experiment. With a 200-kHz chopping frequency only a thin layer of the crystal surface is inspected (thermal diffusion length l = 0.64 microm), while the lateral limit of resolution is given by the laser spot radius (R(1) = 1 microm). It is possible to decrease this limit by using a smaller laser spot, but the chopping frequency ought to be increased.
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