Abstract
A microscope manifesting a dynamic range of several microns and an axial (or height) resolution of 1nm is presented. It is based on the method of angle deviation due to nonfocal plane reflection and the application of surface plasmon resonance effect as well as the technique of heterodyne interferometry. The deviation angle and the induced phase difference between two rays are proportional to the departure from the focal plane. Using the common-path heterodyne interferometry to scan the specimen and measure the phase difference distribution, the surface profile would be obtained in real time.
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