Laser Processing of Semiconductor Materials

Abstract

The use of high power lasers in a variety of materials processing steps is a rapidly growing technology. Well-developed applications include drilling, cutting, and welding; applications still being developed include surface alloying, laser shock hardening, and laser glazing. More recently, the use of laser radiation for processing semiconductor materials and in a variety of device fabrication steps has received widespread attention. This review describes the developments in laser processing of semiconductors during the past four years. 120 references, 8 figures.