Laser processing of optical material: Drilling, dicing and modifying thin glass

Abstract

This paper reports on strategies for the laser processing of glasses and other optically transparent materials using diode pumped solid state laser systems generating short or ultra-short pulses in the optical spectra at a good beam quality. Utilizing non-linear absorption channels, even ns green (532nm) laser light can potentially drill and cut glass in different thickness, depending on fluence, feed rate and pulse width. This characterizes a very interesting processing alternative, especially for certain type of optical materials and/or geometric conditions, where standard methods demonstrate severe limitations. Application near processing examples using up to 10W of ns laser pulses at 532nm are presented and discussed. Ultra-short laser pulses with high peek power and moderate single pulse energy introduce additional non-linear optical interaction channels, which can lead to very specific material reactions inside optical materials. The laser-induced local change in the complex refractory index (n+ik) inside optical materials is described as nik-engineering. New experimental results on bulk coloring – practically without visible signs of fracture or cracks – utilizing near infrared fs and ps laser pulses are presented.This paper reports on strategies for the laser processing of glasses and other optically transparent materials using diode pumped solid state laser systems generating short or ultra-short pulses in the optical spectra at a good beam quality. Utilizing non-linear absorption channels, even ns green (532nm) laser light can potentially drill and cut glass in different thickness, depending on fluence, feed rate and pulse width. This characterizes a very interesting processing alternative, especially for certain type of optical materials and/or geometric conditions, where standard methods demonstrate severe limitations. Application near processing examples using up to 10W of ns laser pulses at 532nm are presented and discussed. Ultra-short laser pulses with high peek power and moderate single pulse energy introduce additional non-linear optical interaction channels, which can lead to very specific material reactions inside optical materials. The laser-induced local change in the complex refractory index (n+ik) ...