Abstract

Laser processing is a highly versatile technique for the post-synthesis treatment and modification of transition metal dichalcogenides (TMDCs). However, to date, TMDCs synthesis typically relies on large area CVD growth and lithographic post-processing for nanodevice fabrication, thus relying heavily on complex, capital intensive, vacuum-based processing environments and fabrication tools. This inflexibility necessarily restricts the development of facile, fast, very low-cost synthesis protocols. Here we show that direct, spatially selective synthesis of 2D-TMDCs devices that exhibit excellent electrical, Raman and photoluminescence properties can be realized using laser printing under ambient conditions with minimal lithographic or thermal overheads. Our simple, elegant process can be scaled via conventional laser printing approaches including spatial light modulation and digital light engines to enable mass production protocols such as roll-to-roll processing.

Highlights

  • Laser processing is a highly versatile technique for the post-synthesis treatment and modification of transition metal dichalcogenides (TMDCs)

  • Roll‐to‐roll production of few-layer ­MoS2 films, tens of centimetres in length with excellent long‐range uniformity and stoichiometry have been demonstrated by this ­technique[16]. This promising approach could be applicable for the mass production required by industry due to cost-effectiveness and ease of growth conditions to produce large area TMDCs films

  • This method can be envisioned as localised laser-printing of TMDCs

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Summary

Introduction

Laser processing is a highly versatile technique for the post-synthesis treatment and modification of transition metal dichalcogenides (TMDCs). To date, TMDCs synthesis typically relies on large area CVD growth and lithographic post-processing for nanodevice fabrication, relying heavily on complex, capital intensive, vacuum-based processing environments and fabrication tools. There are still issues faced by CVD process such as mass production of wafer-scale single crystal films, high annealing temperature requirements and long processing times Another bottom up method is the solution-based synthesis of 2D-TMDCs which utilizes thermal decomposition of single source precursors films such as ammonium tetrathiomolybdate (­ NH4)2MoS414 and ammonium tetrathiotungstate ­(NH4)2WS415. Roll‐to‐roll production of few-layer ­MoS2 films, tens of centimetres in length with excellent long‐range uniformity and stoichiometry have been demonstrated by this ­technique[16] This promising approach could be applicable for the mass production required by industry due to cost-effectiveness and ease of growth conditions to produce large area TMDCs films. Like CVD, this method still requires the use of a carefully controlled TMDCs growth environment, as well as standard top-down, cleanroom based lithographic post-processing for device fabrication

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