Abstract
Diamond-like films containing no hydrogen can be deposited from laser plasmas that are highly ionized. Growth rates of 0.5 μm/h over 100 cm2 areas have been realized on untreated substrates of a variety of materials including Si, Ge, ZnS, glass, and plastics. Measurements of optical properties and mass densities support the identification of this laser plasma diamond as a conglomerate of very fine grains of diamond polytypes in a matrix of other carbon forms.
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