Abstract
High quality beam generation project based on High-Tech Research Center Project, which has been approved by Ministry of Education, Culture, Sports, Science and Technology in 1999, has been conducted by advance research institute for science and engineering, Waseda University. In the project, laser photo-cathode RF-gun has been selected for the high quality electron beam source. RF cavities with low dark current, which were made by diamond turning technique, have been successfully manufactured. The low emittance electron beam was realized by choosing the modified laser injection technique. The obtained normalized emittance was about 3 mm mrad at 100 pC of electron charge. The soft X-ray beam generation with the energy of 370 eV, which is in the energy region of so-called “water window” , by inverse Compton scattering has been performed by the collision between IR laser and the low emittance electron beams.
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