Abstract
This paper describes a method for patterning the graphene layer and gold electrodes on a ceramic substrate using a Nd:YAG nanosecond fiber laser. The technique enables the processing of both layers and trimming of the sensor parameters. The main aim was to develop a technique for the effective and efficient shaping of both the sensory layer and the metallic electrodes. The laser shaping method is characterized by high speed and very good shape mapping, regardless of the complexity of the processing. Importantly, the technique enables the simultaneous shaping of both the graphene layer and Au electrodes in a direct process that does not require a complex and expensive masking process, and without damaging the ceramic substrate. Our results confirmed the effectiveness of the developed laser technology for shaping a graphene layer and Au electrodes. The ceramic substrate can be used in the construction of various types of sensors operating in a wide temperature range, especially the cryogenic range.
Highlights
For the last ten years, there has been increasing interest in the use of graphene in electronic devices, transparent conducting electrodes and circuitry, nanocomposites, supercapacitors, and sensors [1,2,3,4,5,6,7,8,9]
This paper describes a method for patterning the graphene layer and gold electrodes on a ceramic substrate (Al2 O3 ) using a Nd:YAG nanosecond fiber laser
We studied samplesDesign based on a layer of HSMG® supported on a ceramic substrate with gold electrodes
Summary
For the last ten years, there has been increasing interest in the use of graphene in electronic devices (all-carbon integrated circuits, transistors), transparent conducting electrodes and circuitry, nanocomposites, supercapacitors, and sensors [1,2,3,4,5,6,7,8,9]. This is due to the extraordinary electronic and thermal properties of graphene, as well as its optical and mechanical potential [9,10,11,12,13]. Producing structures using photolithography requires masking and risks chemical contamination, which can cause unintentional doping of the graphene
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