Abstract
Laser multi-focus separation technology is an effective way to cut thick, transparent and hard materials. In this paper, factors affecting the quality of multi-focus cutting sapphire were investigated. Optical simulations analysis was performed based on experimental results to analyze multi-focal laser beam propagation from air into sapphire. The results show that the focus interval is linearly dependent on refractive index. Spherical aberration due to refractive-index mismatch disperses the laser foci, leading to a reduction in laser power density which has a significant influence on the cutting quality. The aberration is strongly dependent on the refractivity of the material and the effective numerical aperture (NA). By redesigning the distribution of multiple foci to correct spherical aberration, sapphire with a thickness of 2 mm was cut successfully at a scanning speed of 4 mm/s. The roughness of the cutting section was ∼2.5 μm, without obvious observed micro-cracks.
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