Abstract
A method has been developed for the deposition of uniform thin films of Parylene C by the use of laser monitoring. By monitoring the reflectivity of metal-coated substrates during growth of the polymer films, effective anti-reflecting coatings have been deposited which have appreciably improved some properties of chalcogenide and Gd-Co alloy films. The optimum conditions for Parylene C film deposition were found by studying the effect of dimer source temperature and system pressure on the deposition rate and film quality and uniformity. These results are reported and the apparatus is described.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
