Abstract

BaTiO3 thin films in seven thousands of unit-cell layers havebeen successfully fabricated on SrTiO3 (001) substrates by lasermolecular beam epitaxy. The fine streak pattern and the undampingintensity oscillation of reflection high-energy electron diffractionindicate that the BaTiO3 film was layer-by-layer epitaxialgrowth. The measurements of scanning electron microscopy and atomicforce microscopy show that surfaces of the BaTiO3 thin film areatomically smooth. The measurements of x-ray diffraction andtransmission electron microscopy, as well as selected-area electrondiffraction reveal that the BaTiO3 thin film is a c-orientedepitaxial crystalline structure.

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