Abstract
Nd:YAG laser (1064 nm) and ArF laser (193 nm) surface machining of 400 μm thick, free-standing CVD diamond plates produced photon interaction zones which were chemically and structurally altered. A significant H loss and change in CC bonding environment were observed in the Nd:YAG laser-processed specimens, while ArF laser processing exhibited less H depletion and structural alteration on a less extensive spatial scale. These results are related to the different interaction mechanisms of Nd:YAG and ArF laser photons with diamond.
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