Laser light scattering characterization of particle size distribution in porous silicon

Abstract

We describe a purely optical technique, laser light scattering, to determine number-weighted particle size distribution in porous silicon (PS) with nanoscale resolution. Our result shows that the size of nanoscale particles in porous silicon is about 5.5 nm in diameter with distribution range from 3.5 to 14 nm. In the photoluminescence spectrum of this porous silicon sample, there appear two peaks, one peak locates at 658 nm, and the other locates at 805 nm. The information of particle size distribution in porous silicon holds much promise for elucidation of the visible light emission mechanism in porous silicon.