Abstract
Summary form only given. Laser initiation of a low ionization seed (2-6 mTorr) gas in high pressure(>10 Torr) gases is examined. An excimer laser operating at 193 nm is used to initiate a high density, low ionization energy (6.1 eV) organic seed gas plasma of 10/sup 13///cm/sup 3/ and a low electron temperatures of 100 Torr) to determine optimum gas mix and RF power requirements for producing high density plasmas in high pressure conditions. We utilize mm wave interferometry, optical spectroscopy and antenna loading impedance measurements and analyses to determine the ionization and recombination processes occurring in the high pressure discharges. The influence of the laser/RF timing and power levels, gas mixes as well as density and spectroscopic data are used to determine the ionic constituents and plasma decay processes for the high pressure plasma discharges.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
