Laser-induced plasmas in micromachined fused silica cavities

Abstract

Cavity formation is a frequent result in many laser ablation applications. Although most theoretical investigations have been devoted to laser ablation on a flat surface, the development of a laser plasma inside a cavity is of both fundamental as well as practical significance. In this study, the temperature and electron number density of laser-induced plasmas in fused silica cavities were determined using spectroscopic methods. The effects of cavity aspect ratio on plasma properties were investigated. The temperature and electron number density of laser-induced plasma were measured to be much higher and to decrease faster for a plasma inside a cavity than on the flat surface. Cavity wall influences on the plasma expansion are discussed.