Abstract
The temperature of metastable chlorine ions in a time‐modulated inductively coupled plasma was measured with the time‐resolved laser‐induced fluorescence technique. The temperature changed periodically according to the modulation of the plasma and decreased slightly in the afterglow region. The temperature was measured as a function of rf power and gas pressure, while the relative density was also measured simultaneously as a function of time. The density decreased to be 30% of the maximum density within 10 μs in the discharge‐off periods. © 2000 The Electrochemical Society. All rights reserved.
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