Laser-induced damage of rugate and quarter-wave stacks high reflectors deposited by ion-beam sputtering

Abstract

Rugate and high/low quarter-wave stacks high reflector coatings for 1064 nm have been prepared with Ta 2 O 5 and SiO 2 by an ion-beam sputtering technique. A laser-induced damage experiment of the samples has been conducted at 1064 nm with pulse duration of 5 ns [full width at half maximum (FWHM)]. These two samples’ damages both initiate at defects and show almost the same damage threshold within the experimental error. Nevertheless, the damage morphology on rugate is less severe at higher fluences. The thermal shock wave induced by a nanosecond pulsed laser is considered to be the main cause of catastrophic damage.