Abstract
Surface acoustic waves guided by a copper line embedded in a silica film on a silicon wafer were generated and detected optically using the laser-induced transient grating technique. Lines as narrow as ∼0.2 μm yield a good signal despite the much larger size of the laser spot. The phase velocity of the guided mode is slightly lower than the surface acoustic wave velocity in the thin film structure. Good correlation between the acoustic frequency and the electrical resistivity of the copper lines results from the dependence of both measurements on the line width.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
