Abstract
A computational model for drilling holes with focused Gaussian laser beams is presented and compared with experimental results. Unlike earlier models, the beam divergence near the focus is taken into account and is shown to affect the hole profile strongly. The model correctly mimics experimental observations, which include the effect of moving the beam waist away from the sample surface and the dependence of the hole profile on beam divergence. It also demonstrates the optical conditions needed to drill cylindrical or conical holes.
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