Abstract
A laser diode based probing system for the electro-optic measurement of fast electrical wave forms has been developed. The system has been optimized to yield a very high voltage sensitivity of 5 mV/√Hz which is only a factor of 1.4 above the shot noise limit. Furthermore, by a proper orientation of the crystal probe the sensitivity to field components parallel to the propagating laser beam are greatly enhanced and absolute voltage measurements are thus made possible which is also verified experimentally. The temporal resolution is limited by the duration of the laser pulses which in our case is below 40 ps. A comparison with electrical sampling measurements shows the good performance of the detection system. Because of its low invasiveness the electro-optic crystal probe can be applied to wave form measurements on lines within integrated circuits as well as for interconnects on board level.
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