Laser deposition of amorphous diamond-like films from liquid aromatic hydrocarbons

Abstract

An experimental investigation was made of the deposition of amorphous diamond-like films on transparent substrates by laser irradiation of the interfaces between such substrates and liquid hydrocarbons [toluene C6H5CH3, benzene C6H6, cumene C6H5CH(CH3)2]. A copper vapour laser (wavelength 510.6 nm, pulse duration 20 ns) was used. The films were studied with x-ray Auger spectroscopy, high-energy electron diffraction, scanning electron microscopy, and Raman scattering spectroscopy. The sp3 fraction in the deposited films reached 50% — 70%, depending on the choice of hydrocarbon. The average film thickness was 100 — 200 nm and the microhardness reached 50 — 70 GPa.