Laser Cvd of Tungsten on Silicon Oxynitride

Abstract

AbstractLaser direct writing of tungsten from WF6 onto 0.6 μm thick films of silicon oxynitride on silicon using an argon-ion laser beam is investigated. XPS studies show that WF6 is chemisorbed on the oxynitride surface and that nitrogen plays a role in this adsorption. Deposits have good adhesion, columnar growth structure and resistivities ranging from 13 to 25 μΩ-cm. The deposition conditions significantly affect the deposit morphology and profile. In particular, increasing the hydrogen pressure increases the linewidth but reduces the thickness. Mass transport phenomena are invoked to explain these effects.