Abstract
A laser-induced thermochemical reaction has been used to etch single crystalline magnetic ferrite for industrial application to recording-head processing. Scanning focused Ar-ion laser irradiation to ferrite in flowing aqueous solutions of KOH or H3PO4 resulted in etch rates of 350–400 μm/s with aspect ratios of up to 40. Metal-In-Gap (MIG) head structures with Sendust (FeAlSi) have been successfully fabricated using laser chemical processing. The MIG head fabricated by laser chemical processing showed better performance than that by conventional mechanical machining.
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