Abstract
We have investigated the process of copper layer ablation with a tightly focused Q-switched 532nm laser. Focusing 40ns long laser pulses to a micrometer-sized spot results in high energy density and gives rise to ablation phenomena not seen during laser processing with larger beam diameters. Use of acousto-optic deflectors (AODs) enabled us to test different laser beam steering approaches in terms of choosing the position for each laser pulse independently of the previous pulses. Random addressing of desired positions across a microstructure proved to be the most efficient method compared to various scanning approaches. Assigning a random order to the spatial sequence of laser pulses resulted in the fastest microstructuring process and featured lowest residual heating of the substrate.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
