Abstract
The Young’s modulus, density, and thickness of a 20.3μm polycrystalline silicon layer deposited on a silicon wafer covered with a ∼2.5-μm-thick silicon-oxide interface layer were measured using projection masks to generate surface acoustic waves (SAWs) with higher harmonics approaching 600MHz. The propagating SAW train was detected with a laser probe-beam-deflection setup. The characteristic strongly nonlinear dispersion effect allowed the simultaneous extraction of several unknown film properties. The dispersion was described theoretically by the boundary element method model. A Young’s modulus of 152GPa, a density of 2.25g∕cm3, and a film thickness of 20.3μm were determined for the polycrystalline silicon film.
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