Abstract
Ultrafine Si powder has been produced by means of laser assisted decomposition of SiH4. Optical on-line diagnostics and final product analysis have been employed in order to establish both gas-phase precursor dissociation and particle growth mechanism. Morphologic and crystallographic characterizations of the powder have been performed. Nitridation of Si powders and compacts have been accomplished. Results are compared with those obtained by direct laser induced photosynthesis of Si3N4 powder.
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