Laser-assisted replication of large-area nanostructures

Abstract

We proposed and demonstrated a high-throughput fabrication method for large-area nanostructured polymers. The mold used consists of a quartz substrate and a nanostructured diamond-like carbon (DLC) thin film. A laser is irradiated from the back of the mold and only the DLC surface is directly heated. Then the surface of a polymethyl methacrylate (PMMA) film pressed by the mold is melted and the nanostructures are replicated. In this method, replication can be achieved with a low amount of heat and a short cycle time compared with conventional thermal replication. The effects of the laser power density, irradiation time, and environmental temperature on the replication area were experimentally investigated via the spot irradiation of a laser. Furthermore, the temperature distribution around the surfaces of the mold and polymer was investigated by performing numerical simulations. By scanning the laser, we successfully demonstrated the replication of a 500-nm-pitch pattern on a PMMA film with an area of 10×10mm2 in about 10s. This technique is expected to lead to the high-throughput and low-energy fabrication of large-area nanostructured optical films.