Laser-Assisted Fabrication of a Highly Sensitive and Flexible Micro Pyramid-Structured Pressure Sensor for E-Skin Applications

Abstract

A novel capacitive pressure sensor based on micro-structured polydimethylsiloxane (PDMS) dielectric layer was developed for wearable E-skin and touch sensing applications. The pressure sensor was fabricated on a flexible polyethylene terephthalate (PET) substrate, using PDMS and silver (Ag) as the dielectric and electrode layers, respectively. A set of PDMS films with pyramid shaped micro-structures were fabricated using a laser engraved acrylic mold. The electrodes (top and bottom) were fabricated by depositing Ag on PET films using additive screen-printing process. The pressure sensor was assembled by attaching the top and bottom Ag electrodes to the smooth side of pyramid shaped micro-structured PDMS (PM-PDMS) films. The top PM-PDMS was then placed on the bottom PM-PDMS. The capability of the fabricated pressure sensor was investigated by subjecting the sensor to pressures ranging from 0 to 10 kPa. A sensitivity of 0.221% Pa <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> , 0.033% Pa <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> and 0.011% Pa <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> along with a correlation coefficient of 0.9536, 0.9586 and 0.9826 was obtained for the pressure sensor in the pressure range of 0 Pa to 100 Pa, 100 Pa to 1000 Pa, and 1 kPa to 10 kPa, respectively. The pressure sensor also possesses a fast response time of 50 ms, low hysteresis of 0.7%, recovery time of 150 ms and excellent cycling stability over 1000 cycles. The results demonstrated the efficient detection of pressure generated from various activities such as hand gesture and carotid pulse measurement. The PM-PDMS based pressure sensor offers a simple and cost-effective approach to monitor pressure in E-skin applications.