Abstract
AbstractWe have modified the properties of diamond-like atomic-scale composite (DLASC) material of various thicknesses (5 μm – 70 μm) by means of (a) cw Ar-ion laser annealing using a focussed beam (˜ 2 μm spot size) and (b) thermal annealing (400°C≤ T ≤800°C for one hour). These DLASC films [amorphous “diamond-like/quartz-like” a-(C:H/Si:O)] constitute a novel class of diamond-related materials. The annealing effects were investigated by micro-Raman scattering. The laser annealing procedure shows that the structure of these films can be altered locally from amorphous to nano-crystallite depending not only on the parameters of the annealing process (annealing time, laser intensity) but also the mechanical properties (hardness and stress) of the DLASC films.
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