Abstract
In the micro-fabrication, small installation misalignment and deformation of the workpiece cause fatal damage. On-machine measurement is one of the efficient methods to prevent this damage. Our system performs the laser machining and the three-dimensional measurement of the workpiece position using only one laser. Based on the measurement result, the position error of the workpiece is automatically corrected and laser-machined. Electrochemical machining (ECM) is also done on the same machining system. In this paper, the configuration of the system is explained. Measurement and error correcting techniques are described in detail. And the experimental results that made stent shape using the micro-tube of diameter 120 μm and 210 μm are shown.
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