Abstract
The mass spectrum of titanium-carbon clusters produced in the gas phase by laser-induced plasma reaction shows that Ti 8C 12 (met-car) is a stable species, which coexists with Ti n C 2 n clusters. But, the transmission electron microscopy measurements indicate that only TiC nanometer crystals with rocksalt-like structure are in the laser-deposited TiC films, and have a mean size of about 50 Å. The scanning electron microscopy observation and the measurement of the film conductivity show that the films are continuous and uniform above a thickness of 40 Å.
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