Large-scale-integrated silicon photonics using microdisk and microring resonators

Abstract

We review our recent work on silicon photonic devices for on-chip optical interconnects and optofluidics. On the optical interconnects front, we demonstrate coupled-resonator optical waveguides with gapless inter-cavity coupling for on-chip wide-bandwidth high-order optical channel filters and optical delay lines. We propose a 5×5 matrix switch comprising two-dimensionally cascaded microring resonator-based electrooptic switches for network-on-chip applications and demonstrate a 2×2 matrix switch as a proof-of-concept. We demonstrate cavity-enhanced photocurrent generation in a p-i-n diode embedded microring resonator for wavelength-selective photodetection and monitoring on-chip optical networks. We also investigate a serial-cascaded double-microring-based silicon photonic circuit for high-speed on-chip clock-recovery applications. On the optofluidics front, we study silicon nitride based waveguides with integrated microfluidic channels for optical manipulation of microparticles.