Large-Scale Silicon Photonic Circuits for Optical Phased Arrays

Abstract

We review recent advances in integrated large-scale optical phased arrays. The design and fabrication of large-scale optical phased arrays using silicon photonic circuits are discussed from device designs including the directional couplers, thermo-optic phase shifters, and optical nanoantennas, to system studies including phased array synthesis and noise analysis. By taking advantage of the well-developed silicon complementary metal-oxide-semiconductor (CMOS) fabrication technology, several large-scale integrated silicon photonic phased arrays are demonstrated, including two passive-phased arrays (64 × 64 and 32 × 32) with the ability to generate complex holographic images, an 8 × 8 active phased array for dynamic optical beamforming, and an 8 × 8 active antenna array with amplitude apodization. These optical phased array demonstrations, with up to 12 000 integrated optical elements, represent the largest and densest silicon photonic circuits demonstrated to date.