Large-scale and non-contact surface topography measurement using scanning ion conductance microscopy and sub-aperture stitching technique

Abstract

In this paper, we propose a large-scale and non-contact surface topography measurement method using a non-contact scanning probe microscopy (SPM) technique, scanning ion conductance microscopy (SICM), combined with the sub-aperture stitching technique. The phase correlation techniques were first applied to the three-dimensional (3D) images measured by the SICM to acquire an initially coarse stitching position. Then the tip–tilt compensated sub-aperture stitching algorithm is utilized to eliminate tilts and translations among adjacent images and expand the lateral measuring range of the existing hopping mode SICM system. This SICM and the stitching based method has been used to measure some large-scale samples (micrometer to millimeter scale) in a non-contact, quantitative and high resolution way. Simulation and experimental results on these samples verify the feasibility of this method and the effectiveness of the stitching algorithm. A measuring range of 1.08 mm × 0.55 mm and a lateral resolution of 100 nm or even higher were obtained in these experiments. Compared with atomic force microscopy (AFM), the non-contact feature of the proposed method ensures less damage to the surface topography. The non-optical feature makes the data stitching simpler than the existing optical microscopic methods, which need consider how to compensate the vignetting effect caused by the inhomogeneity of light.