Abstract
The ability to produce homogeneous large-area films is a prerequisite for the application of superconductors in passive devices such as quasi-optical bandpass filters or industrial-scale production on commercial-size wafer substrates. This publication focuses on the large-are coverage capabilities for the deposition of YBa 2 Cu 3 O 7− x (YBCO) films via the activated reactive evaporation (ARE) technique. Various parameters (deposition rate, structure, composition, critical transition temperature etc.) will be presented as a function of substrate coverage. They demonstrate that ARE has the potential to achieve good large-area coverage. Based on these results and after comparing them to the findings of other research teams, achievements and recommended improvements for optimized YBCO film deposition with the ARE tecnique will be discussed from the viewpoint of processing technology.
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