Abstract
A large-area binary blazed grating coupler for the arrayed waveguide grating (AWG) demodulation integrated microsystem on silicon-on-insulator (SOI) was designed for the first time. Through the coupler, light can be coupled into the SOI waveguide from the InP-based C-band LED for the AWG demodulation integrated microsystem to function. Both the length and width of the grating coupler are 360 μm, as large as the InP-based C-band LED light emitting area in the system. The coupler was designed and optimized based on the finite difference time domain method. When the incident angle of the light source is 0°, the coupling efficiency of the binary blazed grating is 40.92%, and the 3 dB bandwidth is 72 nm at a wavelength of 1550 nm.
Highlights
Fiber Bragg grating (FBG) sensors are widely known to have achieved great progress
Light can be coupled into the SOI waveguide from the InP-based C-band LED for the arrayed waveguide grating (AWG) demodulation integrated microsystem to function
The fiber grating demodulation system based on arrayed waveguide grating (AWG) is a new potential method that can be used for fiber grating demodulation, which is smaller and cheaper than the conventional fiber grating demodulation system [2]
Summary
Fiber Bragg grating (FBG) sensors are widely known to have achieved great progress. These sensors are used to measure strain, temperature, pressure, and other physical quantities that can be converted into strain or temperature [1]. The current work aims to study the integration of AWG demodulation system to achieve an AWG demodulation integrated microsystem. Light source is very important for the integrated microsystem, and siliconon-insulator- (SOI-) LEDs are difficult to achieve under the current process [3]. The InP-based C-band LED and SOI waveguide are bonded by benzocyclobutene (BCB) using heterogeneous integration
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