Abstract
A mathematical model for the open-circuit output voltage of a micromachined silicon condenser microphone with a single deeply corrugated diaphragm as a function of the applied acoustic pressure is presented. The model, basically a sine-series function, can easily yield closed-form expressions for the amplitudes of the output components resulting from a multisinusoidal input acoustic pressure. The special case of an equal-amplitude two-tone acoustic pressure input is considered in detail. The results show that the microphone generates only odd-order harmonic and intermodulation products. The results also show that the amplitudes of these components are strongly dependent on the microphone parameters, the corrugation depth and the ratio between the half-length of the diaphragm and its thickness. Moreover, the results show that the acoustic pressure required to produce a pre-specified output open-circuit voltage is strongly dependent on these parameters.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
