Large‐Scale Synthesis of Flexible Cermet Interdigital Electrodes with Stable Ceramic‐Metal Contact for Fire‐Resistant Pressure Tactile Sensors

Abstract

AbstractCermet has broad applications in electronics, but achieving stable ceramic‐metal contact has always been a challenge, particularly at hot temperature and large deformation conditions, due to the significant differences in thermal expansion coefficient and stiffness of ceramics and metals. Here, stress matching and strong interphase bonding at the heterogenous ceramic‐metal contact are realized by using flexible ceramics, leading to stable applications in flexible fire‐resistant pressure tactile sensors. Cu/Au nanolayers are deposited first onto the toughened flexible SiO2 nanofibers with a chemical plating method to form sensitive interdigital electrode sensors, then use an in situ thermal reaction strategy to form conformal and interlocked Au3Cu and CuSiO3 interphases, which enhance the mechanical thermal stability of the ceramic‐metal contact. With deep learning technique, the as‐fabricated intelligent pressure tactile gloves can accurately recognize the human body parts in low‐visible burning environments and show a long‐term stability over 1000 cycles with a high sensitivity of 112.18 kPa−1, which is important for developing intelligent firefighting.