Abstract
A method is proposed and demonstrated to improve a diffraction grating displacement sensor to simultaneously achieve nanometer-level resolution and an extended range of operation. The method exploits the polarization phase-shifting optical path to extract two sinusoidal signals with a quadrature phase shift. The interpolation circuit is applied to nonlinearly convert two sinusoidal signals into a standard incremental AB quadrature digital signal, implementing an extended operation range with the magnitude of a laser coherence length. This work enables displacement measurement operated at large-scale range, and provides a significant guide for the design of a high performance micro-displacement sensor.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.