Large scale fabrication of suspended graphene nanoribbon arrays

Abstract

The suspended graphene nanoribbon (GNR) arrays have been fabricated in large scale by plasma chemical vapor deposition (CVD) with Ni nanobar catalysts. The growth mechanism of GNRs has been also systematically investigated through the comparison with plasma and thermal CVD. The structural deformation rate of Ni can be highly suppressed in plasma CVD compared with that of thermal CVD. Because of the low deformation rate, the Ni nanobar can maintain the structure even under the high temperature condition, which should be the key factor to realize the growth of GNRs from Ni nanobar by plasma CVD. By following this growth model, the growth condition of GNRs can be adjusted, resulting in the high rate synthesis (over 90%) of suspended GNRs in large scale.