Large Scale Discharge -Pumped Excimer Laser Research At NRL

Abstract

The Laser Physics Branch at the Naval Research Laboratory has been involved in research on excimer lasers since their inception, and has conducted research in both electron beam and discharge-pumped systems. For the past few years, a major interest has been an investigation of the scalability of discharge-pumped excimer lasers, which have advantages over electron beam systems in their demonstrated overall efficiency and operability at high repetition rates. With the use of x-ray preionization and long pulse driving circuitry, it became evident that discharge-pumped lasers had the potential for volumetric scaling well above the small aperture common to laboratory and commercial devices. Experimental demonstrations were necessary to confirm that appropriate discharges could be sustained in high pressure excimer gas mixtures over large apertures. This was done with the construction and operation of xenon chloride lasers with 10,15, and 20 cm electrode separations. Investigations were made into the feasibility of further scaling, resulting in new techniques to minimize the inductance while eliminating surface discharges.