Large-range nanoscale self-mixing interferometer based on multiple reflections and even-power fast algorithm

Abstract

We propose a novel integrated measuring technique (IMT) in self-mixing interference (SMI) for measuring the nanoscale vibration, which is realized by combining multiple reflections with the even-power fast algorithm Theoretical analysis show that the fringe precision could be improved to λ/(2n+3∗G). The experiments with amplitudes of 680 nm and 100 nm have been carried out to verify the feasibility of IMT. The minimum measurement error is 1.34 nm, which is within the theoretical error range. Based on the experimental results, the alignment of the external mirror and the repeatability of the experiment are also discussed. Given its high precision, compact structure, and large measurement range, the proposed method has potential applications in the field of high precision nanometer measurement.